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Paper Title : Simulation study on MEMS based Electro Thermal Actuator for Robotic Application
ISSN : 2395-1303
Year of Publication : 2020
MLA Style: -Kirankumar B. Balavalad, Ashokkumar.M, AyyappaVajjaramatti, Praveenkumar B. Balavalad "Simulation study on MEMS based Electro Thermal Actuator for Robotic Application" Volume 6 - Issue 3(1-8) May - June,2020 International Journal of Engineering and Techniques (IJET) ,ISSN:2395-1303 , www.ijetjournal.org
APA Style: -Kirankumar B. Balavalad, Ashokkumar.M, AyyappaVajjaramatti, Praveenkumar B. Balavalad "Simulation study on MEMS based Electro Thermal Actuator for Robotic Application" Volume 6 - Issue 3(1-8) May - June,2020 International Journal of Engineering and Techniques (IJET) ,ISSN:2395-1303 , www.ijetjournal.org
- The paper discusses the simulation-based analysis of the MEMS based electrothermal actuator. In the paper U-shaped vertical and horizontal electrothermal actuators are simulated. These actuators work based on the Peltier effect i.e. when an unequal voltage is applied at two junctions containing a loop, it produces a temperature. The resulting temperature thermally expand the material creating an actuation. The paper presents the simulation of two vertical U-shaped electrothermal actuators. The simulation results show that horizontal actuator provides better actuation compared to the vertical electrothermal actuator. These actuators can be potentially used in robotic applications. The actuators simulated here can be used in the robot legs to create the motion. The U-shaped horizontal electrothermal actuator can be very efficiently used in the robot legs for its movement as it provides better displacement at smaller input voltages. Voltages up to 15 V will provide a considerable displacement of around 13μm for a robotic motion.
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MEMS, U-shaped electrothermal actuator. Temperature gradient, COMSOL Multiphysics, robotic motion.